Lens-on-MEMS Technology Could Lead To More Compact Optical Devices

In a collaboration between Argonne National Laboratory and Harvard University, researchers have built a metasurface-based lens on top of a MEMS platform, creating a “lens-on-MEMS” device that focuses light in the mid-IR spectrum. The MEMS-integrated metasurface lens combines the best features of both technologies while reducing the size of the optical system. It measures 900 microns in diameter and is 10 microns thick. In this hybrid device, MEMS mirrors reflect scanned light, which the metalens then focuses without the need for an additional optical component such as a focusing lens.

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